Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
Investigation of KOH Anisotropic Etching for the Fabrication of Sharp Tips in Silicon-on-Insulator (SOI) Material
KOH etching of (100) Si wafer, No 1
Wet Etching of Silicon - ScienceDirect
Fabricating MEMS and Nanotechnology
Wet Etching and Bulk Micromachining Fundamentals of Micromachining Dr. Bruce K. Gale Key Technologies of Wet Etching
The fabricated silicon membrane. KOH etching wall produces 54.7 o angle... | Download Scientific Diagram
KOH etching of (100) Si wafer, No 2
Fabrication of a vertical sidewall using double-sided anisotropic etching of 100 oriented silicon
Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS | Micro and Nano Systems Letters | Full Text
Unprotected sidewalls of implantable silicon-based neural probes and conformal coating as a solution | npj Materials Degradation
Differences in etching characteristics of TMAH and KOH on preparing inverted pyramids for silicon solar cells - ScienceDirect
Solved KOH etching. Design a window on the mask for etching | Chegg.com
Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
Anisotropic etching 동영상 - YouTube
RCA Clean and KOH Wet-Chemical Etch of Silicon
Facile and low‐cost fabrication of uniform silicon micro/nanostructures by nanopitting‐assisted wet chemical etching - Wang - 2018 - Micro & Nano Letters - Wiley Online Library
Systematic study of the etching characteristics of Si{111} in modified TMAH - Swarnalatha - 2020 - Micro & Nano Letters - Wiley Online Library
Can someone explain why the anisotropic KOH etch of silicon only ever etches *inward* from the edges of the exposed area of the mask? | ResearchGate
KOH Etching
